We develop a low-temperature plasma-assisted selenization technique to grow different 2D materials for high-sensitivity gas sensing applications. It overcomes the current requirement for growth temperatures above 700°C, meeting semiconductor standard processes. The advantages include large-scale production, and tunability of thickness and phase. 2D materials exhibit enhanced corrosion resistance and material stability against corrosive and toxic gases like H2S and NH3.

Corrosive gases are widely used in many industries, but current sensors face challenges such as short lifespan and high maintenance costs. We develop novel 2D materials with excellent corrosion resistance, maintaining stability and high sensitivity in prolonged corrosive environments. Additionally, we achieve large-scale, uniform, and layer-controlled growth of 2D materials, significantly reducing production costs and improving performance stability.

We dedicated to developing high-sensitivity, high-stability, and corrosion-resistant gas sensors. Our initial goal is to monitor toxic gas leaks in semiconductor factories for enhancing safety. Next, we aim to apply our sensors to smart toilets and sewage systems for intelligent management. Our long-term goal is to integrate sensors into elder health care, monitoring moisture, and odors in diapers, thereby reducing skin irritation and infection risks and improving caregiving efficiency.