This technique mainly monitorsanalyzes the composition of sub-micron particles generated during vacuum valve operation,real-time test various types of particlespollution sources. Through “data collectionfeedback product design” model, manufacturers could quickly understand the product qualitytreat results as the bases for product improvement.

Similar system was announced by VAT group to measure particle sizes from 10 nanometers to 10 micronmeters. This technique is the first system in Taiwan to measure minimum particle size of 1 nanometermaximum particle density of 107 particles/cm3. We also introduce standard testing procedures for monitoringanalyzing particles processes to improve the pollution issues in high vacuum systems

The technique combines industry, academia,research institute to cultivate industrial equipment self-madeindependent researchdevelopment capabilities. In the future, integrating equipment industry to drive key components development locally from upstream to downstreameventually fulfill the goal of equipmentkey components local independent supplyenhance Taiwan industria