Technical Name Semiconductor device structuremethod for forming the same
Project Operator National Taiwan University
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Summary
With (a) the good device performances of MoS2 transistors with short channel lengths, (b) the low contact resistance of graphene on MoS2(c) the epitaxially grown graphene/MoS2 hetero-structures, we proposed a MoS2 transistor architecture fabricated by using AFM anode oxidation on graphene/MoS2 hetero-structures. With additional gate dielectric layer deposition, both bottom-top- gate devi
Scientific Breakthrough
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Industrial Applicability
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