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    • Atomic layer technologies for advanced materialsmodules

      Smart machinerynovel materials FutureTech Atomic layer technologies for advanced materialsmodules

      With rapid evolution of Moores lawsemiconductor technology nodes down to sub-10 nm, advanced devicematerial technologies capable of Å accuracy are highly demanded. Thus we developed atomic layer technologies including atomic layer deposition, atomic layer annealing, atomic layer epitaxy,atomic layer etching, etc. for extreme control of materialsstructures with Å precision.
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