Here we prepare a non-evaporative getter (NEG) film using magnetron sputtering. A vacuum chamber with a sputtered NEG film can maintain ultra-high vacuum (-10 Torr level) without any pump after activation. The activation temperature can be controlled below 200 °C according to different process conditions. The activated NEG film adsorbs residual gases in the vacuum system to achieve the UHV.

This technology develop a “Thermoelectric Ever-Charge Portable Charger” for the applications in auxiliary charging of consumer electronicsfast self-charging for outdoor sensors. Technically, a sputtering depositiona semiconductor photolithography technique are combined to fabricate p-n materialsconnection procedures. The thermoelectric performance of the device is further optimized through a low-temperature heat treatment.

"Visible Light Communication (VLC)" is the best candidate for the next generation of network communication owing to its wide bandwidthscompatibility with solid-state lighting devices. Our proposed technology features a novel multilevel photosensing memory which can integrate the photosensing, memorycomputation components for VLC into one device. This device is based on a thin film transistor, where the oxide semiconductor is added with gold nanoparticles to form a "co-active layer" in order to expand the visible light sensing spectrumefficiently convert the light signal into a current signal. It not only simplifies the production processreduces the cost, but also accelerates the signal transmission speed, which further advances the future mobile comm

The location of controlled-grain Si island is determined by the pattern of “cooling holes”. The grain size is determined by the distance between “holes” due to lateral grain growth using pulse laser crystallization. This predictability allows the transistorscircuits to stay away from the grain boundaries for monolithic

With rapid evolution of Moores lawsemiconductor technology nodes down to sub-10 nm, advanced devicematerial technologies capable of Å accuracy are highly demanded. Thus we developed atomic layer technologies including atomic layer deposition, atomic layer annealing, atomic layer epitaxy,atomic layer etching, etc. for extreme control of materialsstructures with Å precision.

Severe acute respiratory syndrome coronavirus 2 (SARS-CoV-2) infected human cell through ACE2. This study is developing a Pd nano-thin film electrode for electrochemical impedance spectroscopy. This invention can quantify neutralize antibody too. The detection platform can be used to screen 1 microliter anti-virus infection drug sample within 21 mins. Compare to SPR standard, our invention only needs 1/10000 concentration of ACE2reaction volume is ~1/30 than SPR. This invention can be adapted in detection of cancer markers,other emergency infection diseasestherapeutic drugs, too.