We develope ZnO:Li as lead-free piezoelectric materialssuccessfully develop lead-free piezoelectric MEMS accelerometers through MEMS process technology. Since the input signal of the SAR ADC is voltage, Therefore, the charge generated by the accelerometer must be converted into a voltage signalthen transfer to the digital code from the SAR ADC.

This study proposes a double elastic steel sheet vibration energy harvester system (DESS VEH), where the vibration generated by the deformation and/or clap of two magnetic excited elastic steel sheets is assisted by a piezo-patch to generate electric energy. The proposed model can be applied on an unmanned helicopterany other multi-rotor drones. The downstream flows from the rotors are collecteddriving a wind-turbine to excite the vibration steel sheet(s) systemgenerating electric power.

"The team established material doping technology to greatly improve the piezoelectric properties of lead-free materials,successfully prepared MEMS lead-free triaxial piezoelectric accelerometers. The use of lead-free materials is the world＇s first development result. In addition, the team also integrated sensors, back-end circuitsuser interfaces, applied the acceleration gauge system to the safety monitoring of unmanned vehicles,successfully integrated the intelligent integrated sensingcontrol system required in the Internet of Things era."