We develope ZnO:Li as lead-free piezoelectric materialssuccessfully develop lead-free piezoelectric MEMS accelerometers through MEMS process technology. Since the input signal of the SAR ADC is voltage, Therefore, the charge generated by the accelerometer must be converted into a voltage signalthen transfer to the digital code from the SAR ADC.

This technology is used micro-electro-mechanical systems combined nanomaterials and micro-heater systems, because the interdisciplinary integrated manufacturing technologies are used to make miniaturized sensor elements, which are equipped with bluetooth functions of algorithms and detection devices to monitor the ketones gas concentration during patient breathing applied in healthy care.

This project proposes a smart contact lens ideally capable of simultaneously observing the tear evaporation rate, the tear osmolarity,the ocular surface temperature. To solve the shortcoming of the current difficulty in quantifying DES, assist doctors in the diagnosis of dry eye conditions, the effectivenessselectivity of drugs, the treatment statusrecovery level.

"The team established material doping technology to greatly improve the piezoelectric properties of lead-free materials,successfully prepared MEMS lead-free triaxial piezoelectric accelerometers. The use of lead-free materials is the world＇s first development result. In addition, the team also integrated sensors, back-end circuitsuser interfaces, applied the acceleration gauge system to the safety monitoring of unmanned vehicles,successfully integrated the intelligent integrated sensingcontrol system required in the Internet of Things era."