This research develops an innovative method for patterning arbitrarycomplicated 3D microstructures on metallic roller surfaces. This roller mold manufacturing system consists of digital light processing, arrayed microlensesoptical fibers,precision servo-controlled motion technologies. Based on this arrayed UV beam pen system, seamless roller molds are fabricated for roller imprintin

Through the technique, SamplingPrediction of Lithography Overlay Errors, the costtime of overlay error measurement can be reduced to improve the process efficiency. We identify key sampling through clusteringmachine learning models,design a new sampling algorithm in photolithography process. Due to the complexity of wafermany training factors of wafer data, we combine the clustering algorithm with incremental learning to meet customers＇ unique needsachieve the goal of optimally samplingreducing the costs.