We develope ZnO:Li as lead-free piezoelectric materialssuccessfully develop lead-free piezoelectric MEMS accelerometers through MEMS process technology. Since the input signal of the SAR ADC is voltage, Therefore, the charge generated by the accelerometer must be converted into a voltage signalthen transfer to the digital code from the SAR ADC.

"The team established material doping technology to greatly improve the piezoelectric properties of lead-free materials,successfully prepared MEMS lead-free triaxial piezoelectric accelerometers. The use of lead-free materials is the world＇s first development result. In addition, the team also integrated sensors, back-end circuitsuser interfaces, applied the acceleration gauge system to the safety monitoring of unmanned vehicles,successfully integrated the intelligent integrated sensingcontrol system required in the Internet of Things era."

Inspired by the surface of the insect skin, a special nanostructure was grown on the membrane surface that is the key for omniphobic membrane which is able to treat low surface energy wastewater. The technique of omniphobic membrane combined with membrane contactors has the opportunity to become a trend in the future for water resources, carbon capture, valuable minerals recoveryhigh-purity drug crystallization.