The technology uses cathodic arc deposition combined with electromagnet field controloptical emission spectroscopy (OES) for the deposition of new functional high entropy alloy (HEA) nitride coatings. The HEA nitride coatings possessed such high hardnessexcellent hydrophobicity with low surface energy which are beneficial for high speed dry cutting. Finally, the coatings were deposited on the micro end mills for cutting test of printed circuit board. The HEA ACZN coated tools can possess high wear resistanceoutperform the uncoated tools at least 4 times of tool lives.