原子層沉積

These stimuli-switchable nanoparticles coated with the cleavable outer polymer coatingmultifunctional peptides may afford a new platform for anticancer drugmiR. These nanoparticles possess characteristics of environmental response, active targeting,gene/chemo combinatorial therapeutics, thus providing spatiotemporal control of posttranｓｃｒｉｐｔional gene regulation, smart nuclear/mitochondrial localization,simultaneous inhibition of multiple progression pathways of tumor cells for enhancing antitumor efficacysafety of cancer therapy.

Inorganic porous nanofibers with surfaceinterface defects are prepared through humidity-controlled electrospinninghigh-temperature annealing technology. Under the irradiation of light sources of different wavelengths (380~780 nm), the bound electrons stored in the valence band can be excited to the conduction band to form free electrons on the surface of the material, generating different intensities of microcurrents, light sensitivitymicrocurrent changes. Because the "inorganic nanofiber" technology has high uniquenesshigh product compatibility, it can be applied to a wide range of markets.

Inorganic porous nanofibers with surfaceinterface defects are prepared through humidity-controlled electrospinninghigh-temperature annealing technology. Under the irradiation of light sources of different wavelengths (380~780 nm), the bound electrons stored in the valence band can be excited to the conduction band to form free electrons on the surface of the material, generating different intensities of microcurrents, light sensitivitymicrocurrent changes. Because the "inorganic nanofiber" technology has high uniquenesshigh product compatibility, it can be applied to a wide range of markets.

With rapid evolution of Moores lawsemiconductor technology nodes down to sub-10 nm, advanced devicematerial technologies capable of Å accuracy are highly demanded. Thus we developed atomic layer technologies including atomic layer deposition, atomic layer annealing, atomic layer epitaxy,atomic layer etching, etc. for extreme control of materialsstructures with Å precision.

A wavelength tunable micro-light-emitting diodes fabricated by the nanometer-level etching technology, the strain-induced engineering can effectively shift the emission wavelength from green to blue. Meanwhile, we introduced the ALD for the passivation layer,the super inkjet printing system used to form the color-conversion layer to emissive red light. Finally, a hybrid type full-color micro-LED has been fabricated with the monolithic epitaxial wafer.

A technique compatible to IC process has been presented to prepare gas sensing chips the lightly-doped region of nanoelectronic devices are grown with different sensing materials to form a gas sensor array. During gas sensing, individual nanodevice was Joule-heated, reducing power consumption to microWatts/device, solving the current high power consumption problem. With self-calibration of temperature, humidityinterfering gas, problems like cross-sensitivity, quantification, specificitysensitivity are solved. A demonstration of I+Nose with smart phone was presented for CO detection.