The patent is a method using magnetic catalytic fluid sensing to sense a fluid, using TSMC 0.35μm 2P4M CMOS-MEMS standard process design and manufacturing a grid-stacked gas sensing chip, using CMOS MEMS process Design and manufacture the required sensing elements, and successfully suspend the sensing structure through the post-process etching process. Combined with the gas sensing circuit to measure carbon monoxide gas. Tin oxide, doped with magnetic material, ferric oxide, is used as the sensing material, and a magnetic catalytic sensing mechanism is proposed to improve the sensitivity of gas detection through different magnetic field strengths and angles.

The patent is a method using magnetic catalytic fluid sensing to sense a fluid, using TSMC 0.35μm 2P4M CMOS-MEMS standard process design and manufacturing a grid-stacked gas sensing chip, using CMOS MEMS process Design and manufacture the required sensing elements, and successfully suspend the sensing structure through the post-process etching process. Combined with the gas sensing circuit to measure carbon monoxide gas. Tin oxide, doped with magnetic material, ferric oxide, is used as the sensing material, and a magnetic catalytic sensing mechanism is proposed to improve the sensitivity of gas detection through different magnetic field strengths and angles.

The new technology and application of the gas sensor components with low power consumption of this patent can be widely used in existing applications, such as the safety monitoring of factory equipment, environmental testing that harms the environment, monitoring of indoor and outdoor air quality, and specific hazards Practitioners at the site, such as the hood of coal mine miners, gas concentration verification equipment, etc. The design of the gas sensor in the aforementioned application scenarios has the application requirements and characteristics of high accuracy of gas detection, continuous external mains power supply, space limitations for the installation of gas-free sensor modules, specific uses, professional practitioners or special equipment, etc. .