This project explores the integration of the digital lithography system, automated optical inspection (AOI), exposure dosage optimization, and machine learning (ML) algorithm to enhance the quality and efficiency of the conventional lithography process. Core technologies include:  4×1 array type digital optical engine with LED at the wavelength of 405nm, synchronization of multiple digital optical engines and translation stage, high-speed control of TI DMD module and firmware for commercial FPGA board with FMC connections, DMD control firmware with ML environment using OpenCL, high-speed computing engine for image processing inside FPGA, optimization algorithm for prediction and analysis of lithography metrics, exposure dosage planning with ML based model on large-area layout, ML based defect classification.

This proposal explores the integration of the digital lithography system, automated optical inspection (AOI), exposure energy optimization, and machine learning (ML) algorithm to enhance the quality and efficiency of the conventional lithography process. The proposed research is divided into three research topics: digital optical engine, high-speed digital micro-mirror device (DMD) FPGA firmware, lithography process control to characterize the exposure dosage and defect classification. Real time simulation and prediction of photoresist pattern results will be provided to engineers for analysis to enhance and boost productivity. SynPower Co, an industry partner will provide the related tools to verify the proposed integration scheme of optical engines, DMD, ML, and AOI respectively.

Digital lithography technology can be applied to IC packaging, printed circuit boards(PCB), panels and LED manufacturing processes. The proposed integration system of digital lithography and optical inspection can elevate Taiwan PCB industry to the next level of intelligent manufacturing.  In addition, through a combination of a customized application software and intelligent tool developed by the team, the project will leverage current Taiwan PCB industry with competitive high-mix/low-volume manufacturing process to overcome future challenges from other PCB industries in the world.