This technology is used micro-electro-mechanical systems combined nanomaterials and micro-heater systems, because the interdisciplinary integrated manufacturing technologies are used to make miniaturized sensor elements, which are equipped with bluetooth functions of algorithms and detection devices to monitor the ketones gas concentration during patient breathing applied in healthy care.

Based on the mass production technique to fabricate 2D materials developed by our group, efficient gas sensors against NOx with sensitivity of 100 ppb are successfully demonstrated. In comparison to international competitors, our products exhibit superior sensitivityselectivity. Furthermore, the technique would be extended to other 2D materials to fabricate various gas sensors against multiple target gases. The integration with internet of things would then open new feasibilities for early monitoring in environmental pollutionhuman safety.

A technique compatible to IC process has been presented to prepare gas sensing chips the lightly-doped region of nanoelectronic devices are grown with different sensing materials to form a gas sensor array. During gas sensing, individual nanodevice was Joule-heated, reducing power consumption to microWatts/device, solving the current high power consumption problem. With self-calibration of temperature, humidityinterfering gas, problems like cross-sensitivity, quantification, specificitysensitivity are solved. A demonstration of I+Nose with smart phone was presented for CO detection.

This probing equipment is integrated by the opto-mechanical, electricalvacuum systematic technologies to efficiently measure the electric properties of gas sensor chips at wafer level. Therefore, we can identify the functionality of each sensor chip in early phasethen discard the unqualified chips to enhance the production efficiencyproducts competition.