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    • Table-top ATTO-EUV laser source

      Electronic & Optoelectronics FutureTech Table-top ATTO-EUV laser source

      Prof. Chen＇s research team at IPT NTHU achieved a breakthrough to build table-top coherent EUV light source. This new accessiblereliable EUV light source makes a lot of the first possibilities, enabling the dynamics of chemical reactions, nano-materialsbio-molecular systems to be studied with unprecedented temporalspatial resolution, e.g. coherent 13.5nm EUV light source for nm-scale defect inspection.
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