Technical Name Magnetic and strong microLED and mass transfer technology
Project Operator National Chiao Tung University
Project Host 洪瑞華
Summary
This technology provides a thin and mechanical strong  micro light-emitting diode (uLEDs) with magnetic metal substrates. It can be applied to blue, green, and red LEDs and solves the uLEDs problem  because the substrate cannot be thinned. This proposed technology first transfers the LED epilayer to a special ultra-thin and magnetic composite metal, because the thermal expansion coefficient matching between the substrate and epilayer. In addition,  the thin-film uLEDs can be made into vertical type LED and offer a large emitting area. Moreover, the magnetic conductive substrate is mainly composed substrate. Therefore,  the metal substrate can be removed by chemical etching. To avoid the problem that the traditional dicing saw cutting has too wide a width, or the leakage of components caused by laser cutting. 
Based on this magnetic substrate uLEDs with the magnetic mass transfer, u-LEDs can be used in the infinitely wide application of future displays.
Scientific Breakthrough
The scientific breakthrough of this technology is as follows:
(1) Verify that the thermal expansion coefficient of the metal substrate can be adjusted to be similar with that of the epitaxial films. Then the epitaxial film can be transferred to this metal substrate without crack;
(2) Verify that chemical etching techniques can be used to obtain discrete u-LEDs chips with substrate support;
(3) Verify that u-LED chips can be made into an array with magnetic force and ultrasonic. Then they can be mass transferred using this u-LEDs array by mass magnetic transfer.
(4) Verify that magnetic force can be used to mass transferring amounts of u-LEDs.
Industrial Applicability
(1) Applied to Thin Film LEDs with high heat dissipation power components, metal substrate industry.
(2) This technology can be made into u-LEDs, and can also use this magnetism to transfer a huge amount to make u-LED displays.
(3) Applied to the automotive light source industry, Laser or VCSEL.
(4) From the upstream metal substrate industry, the chip manufacturing industry, to the LED application industry, and even the equipment industry that provides a magnetic mass transfer. Providing another large amount of transfer technology can promote the application of u-LED to more special applications.
Keyword Copper/Invar/copper composite metal substrate Epitaxial film transfer technology Selective chemical etching technology Power chip light emitting diode Micro light emitting diode Magnetic mass transfer CIC composite metal substrate Epilayer transfer Selective chemical etching Wafer bonding
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